Methods and apparatus for inspecting an object

A method for inspecting an object using a light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, dispersing light emitted from the light source into one of a diffraction pattern and an interference pattern, and imaging t...

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Bibliographische Detailangaben
Hauptverfasser:	HARDING KEVIN G, TAIT ROBERT W, DEMUTH RUSSELL S
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A method for inspecting an object using a light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, dispersing light emitted from the light source into one of a diffraction pattern and an interference pattern, and imaging the patterned light onto the object using a lens.