Process system and device for transporting substrates

A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a ferromagnetic component. At least t...

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Bibliographische Detailangaben
Hauptverfasser:	KLESEN CRISTOF, CASPARI ANDREAS, RODER MARIO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVERSION OR DISTRIBUTION OF ELECTRIC POWER CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL DYNAMO-ELECTRIC MACHINES ELECTRIC EQUIPMENT OR PROPULSION OF ELECTRICALLY-PROPELLEDVEHICLES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES, IN GENERAL GENERATION HANDLING THIN OR FILAMENTARY MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES METALLURGY PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING VEHICLES IN GENERAL
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Beschreibung
Zusammenfassung:	A process system contains a device for transporting substrates along a transport path. The device contains a bearing module and a drive module. The bearing module has a bearing stator with actuators embodied in the form of electromagnets and a bearing rotor with a ferromagnetic component. At least two of the actuators are disposed at a distance from each other and define at least one pair of actuators with an associated gap area formed therebetween. An active magnetic bearing of the bearing rotor is provided in the gap area.