Vacuum pump
A vacuum pump comprises a first pumping section ( 106 ), and, downstream therefrom, a second pumping section ( 108 ), The pump comprises a first pump inlet ( 120 ) through which fluid can enter the pump and pass through both the first and second pumping sections towards a pump outlet, and a second p...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A vacuum pump comprises a first pumping section ( 106 ), and, downstream therefrom, a second pumping section ( 108 ), The pump comprises a first pump inlet ( 120 ) through which fluid can enter the pump and pass through both the first and second pumping sections towards a pump outlet, and a second pump inlet ( 122 ) through which fluid can enter the pump and pass through only the second pumping section towards the outlet. The second pumping section ( 108 ) comprises an externally threaded rotor ( 109 ). |
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