Vacuum pump
A vacuum pump ( 100 ) comprises a first set ( 106 ) of turbo-molecular stages, a molecular drag stage ( 112 ), a first inlet ( 120 ) through which fluid can pass through the first set ( 106 ) of stages and the molecular drag stage ( 112 ) towards a pump outlet ( 116 ), second and third sets ( 108, 1...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A vacuum pump ( 100 ) comprises a first set ( 106 ) of turbo-molecular stages, a molecular drag stage ( 112 ), a first inlet ( 120 ) through which fluid can pass through the first set ( 106 ) of stages and the molecular drag stage ( 112 ) towards a pump outlet ( 116 ), second and third sets ( 108, 110 ) of turbo-molecular stages located between the first set ( 106 ) and the molecular drag stage ( 112 ), a second inlet ( 122 ), the second and third sets ( 108, 110 ) being arranged such that fluid entering the pump through the second inlet ( 122 ) is separated into two streams each flowing through a respective one of the second and third sets ( 108, 110 ), and conduit means ( 126 ) for conveying fluid passing through the first set ( 106 ) and one of the second and third sets ( 108, 110 ) towards the outlet ( 116 ). |
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