Measuring apparatus

An apparatus for determining the topography, shape, or form of (machined) objects is disclosed. The apparatus operative to perform consecutive measurements of the optical path difference (OPD) between a reference surface on one hand and a series of laterally displaced points on one or more partially...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	STUBBE RAOUL, SAHLGREN BENGT
Format:	Patent
Sprache:	eng
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	An apparatus for determining the topography, shape, or form of (machined) objects is disclosed. The apparatus operative to perform consecutive measurements of the optical path difference (OPD) between a reference surface on one hand and a series of laterally displaced points on one or more partially reflecting surfaces of an object on the other hand. The inventive apparatus comprises light source means for emitting light that is swept in optical frequency; means for exposing said surfaces to light from said light source means; means for combining and detecting the light reflected back by said surfaces; means for performing a frequency analysis of the detected signal; and means for calculating OPD from the obtained frequencies. The speed of the frequency sweep is preferably above 50 GHz/mus.