Torsional electrostatic actuator

Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction rotations of the two moveable electrode plates are combined. To this end, at least one arm from at least...

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Bibliographische Detailangaben
Hauptverfasser:	AKSYUK VLADIMIR A, SIMON MARIA E
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CONVERSION OR DISTRIBUTION OF ELECTRIC POWER CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction rotations of the two moveable electrode plates are combined. To this end, at least one arm from at least one of the moveable electrode plates is connected to at least one arm of a moveable electrode plate on the opposite side of the fixed electrode plate, e.g., by a spring. The electrode plates may have comb projections. A post may be coupled at one of its ends to the top of one of the moveable electrode plates, and the post's other end is coupled to a plate, e.g., a mirror or other structure to be moved.