Mobile transportable electrostatic substrate holder

A mobile transportable electrostatic substrate holder is provided that has a diameter or edge length matching the diameter or edge length of a substrate to be transported. The tolerance of the matching dimensions, locally, at certain locations, or everywhere, is less than 0.1 mm. In another embodime...

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Bibliographische Detailangaben
Hauptverfasser:	BUSSE KARL-HERMANN, KEILBACH STEFFEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BORING COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING TURNING
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Beschreibung
Zusammenfassung:	A mobile transportable electrostatic substrate holder is provided that has a diameter or edge length matching the diameter or edge length of a substrate to be transported. The tolerance of the matching dimensions, locally, at certain locations, or everywhere, is less than 0.1 mm. In another embodiment, the substrate holder has a diameter or edge length smaller by 0.1 mm to 30 mm, locally, at certain locations, or everywhere, than the diameter or edge length of the substrate to be transported. In a third embodiment, the substrate holder has a diameter or edge length that is greater by 0.1 mm up to 150 mm, locally, at certain locations, or everywhere, than the diameter or edge length of the substrate to be transported.