Optimizing light path uniformity in inspection systems

An inspection system includes an illumination source configured to illuminate a blazed phase grating sample, image collection pathways and an imaging system configured to capture an image of a sample point of the blazed phase grating sample, and a controller configured to adjust the illumination sou...

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Bibliographische Detailangaben
Hauptverfasser: SCHUMACHER KARL, ROBERTS WILLIAM, KUNKEL GERHARD, LOMTSCHER PATRICK
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An inspection system includes an illumination source configured to illuminate a blazed phase grating sample, image collection pathways and an imaging system configured to capture an image of a sample point of the blazed phase grating sample, and a controller configured to adjust the illumination source in response to an analysis of the image of the sample point to determine illumination uniformity of the inspection system.