Calibration method

In some preferred embodiments of the present invention, a method of performing calibration of an optical axis of a sensor installed on a hand of an arm of a robot by obtaining misalignment of the optical axis of the sensor relative to the hand or by obtaining misalignment of the hand relative to the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KAWABE MITSUNORI, ADACHI MASARU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS HAND TOOLS MANIPULATORS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PERFORMING OPERATIONS PHYSICS PORTABLE POWER-DRIVEN TOOLS REGULATING SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	In some preferred embodiments of the present invention, a method of performing calibration of an optical axis of a sensor installed on a hand of an arm of a robot by obtaining misalignment of the optical axis of the sensor relative to the hand or by obtaining misalignment of the hand relative to the arm is provided. A method of performing calibration by detecting a teaching tool 11 disposed at a semiconductor wafer placing position of a storage container or a carrying device by a sensor 6 installed on a hand 5 of a robot 1 to teach the position of the semiconductor wafer to the robot 1 includes a step of placing the teaching tool 11 at specified position with the robot 1 , a step of predicting the position of the teaching tool 11 detecting the teaching tool 11 with the sensor 6 , and a step of obtaining a difference between the position of the teaching tool 11 and the predicted value.