Integrated high voltage capacitor and a method of manufacture therefor

Integrated high voltage capacitor and a method of manufacture therefor

The present invention provides an integrated high voltage capacitor, a method of manufacture therefore, and an integrated circuit chip including the same. The integrated high voltage capacitor, among other features, includes a first capacitor plate ( 120 ) located over or in a semiconductor substrat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SPRINGER LILY X, LARKIN DAVID L, TAKEMURA MAKOTO, GOKHALE ASHISH V, SARAIYA DHAVAL A
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The present invention provides an integrated high voltage capacitor, a method of manufacture therefore, and an integrated circuit chip including the same. The integrated high voltage capacitor, among other features, includes a first capacitor plate ( 120 ) located over or in a semiconductor substrate ( 105 ), and an insulator ( 130 ) located over the first capacitor plate ( 120 ), at least a portion of the insulator ( 130 ) comprising an interlevel dielectric layer ( 135, 138, 143 , or 148 ). The integrated high voltage capacitor further includes a second capacitor plate ( 160 ) located over the insulator ( 130 ).