THIN FILM RESISTOR WITH CURRENT DENSITY ENHANCING LAYER (CDEL)

THIN FILM RESISTOR WITH CURRENT DENSITY ENHANCING LAYER (CDEL)

A thin film resistor device and method of manufacture includes a layer of a thin film conductor material and a current density enhancing layer (CDEL). The CDEL is an insulator material adapted to adhere to the thin film conductor material and enables the said thin film resistor to carry higher curre...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHINTHAKINDI ANIL K, ESHUN EBENEZER E
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRICITY
RESISTORS
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Beschreibung
Zusammenfassung:A thin film resistor device and method of manufacture includes a layer of a thin film conductor material and a current density enhancing layer (CDEL). The CDEL is an insulator material adapted to adhere to the thin film conductor material and enables the said thin film resistor to carry higher current densities with reduced shift in resistance. In one embodiment, the thin film resistor device includes a single CDEL layer formed on one side (atop or underneath) the thin film conductor material. In a second embodiment, two CDEL layers are formed on both sides (atop and underneath) of the thin film conductor material. The resistor device may be manufactured as part of both BEOL and FEOL processes.