Mems accelerometers

A micro-electro-mechanical systems (MEMS) accelerometer comprises a wafer micro-fabricated to provide a frame ( 10 ) defining an opening within which is disposed a sensing mass ( 14 ). A pair of aligned pivot beams ( 15 ) connect the mass to the frame ( 10 ) so that the axis of pivoting is displaced...

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Bibliographische Detailangaben
Hauptverfasser:	HATT JOSEPH M, HODGINS DIANA
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A micro-electro-mechanical systems (MEMS) accelerometer comprises a wafer micro-fabricated to provide a frame ( 10 ) defining an opening within which is disposed a sensing mass ( 14 ). A pair of aligned pivot beams ( 15 ) connect the mass to the frame ( 10 ) so that the axis of pivoting is displaced from the centre of gravity of the mass. At least one sensing beam ( 16 ) connects the mass ( 14 ) to the frame, the sensing beam ( 16 ) being distorted by pivoting movement of the mass ( 14 ). Distortion of the sensing beam on pivoting movement of the mass is determined, from which the acceleration of the accelerometer may be determined.