Vapor deposition apparatus

A vapor deposition apparatus, developed in particular for on-line deposition of phosphor or scintillator material, wherein said vapor deposition apparatus comprises a crucible containing a mixture of raw materials, a chimney having at least one inlet in communication with the said crucible and a lin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RUDY HENDRIOKX, GUIDO VERREYKEN, LUCAS PEETERS, PETER BLUYS, JOHAN LAMOTTE
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A vapor deposition apparatus, developed in particular for on-line deposition of phosphor or scintillator material, wherein said vapor deposition apparatus comprises a crucible containing a mixture of raw materials, a chimney having at least one inlet in communication with the said crucible and a linear slot outlet, one or more lineair heating elements, contained within said chimney, an oven surrounding said crucible, wherein said oven contains heating elements, shielding elements and cooling elements.