Apparatus for Inspecting the front side and backside of a disk-shaped object

An apparatus for inspecting the front side and the back side 2, 3 of a disc-shaped object 4 is disclosed. A detection unit 5 has a first detector element 6 facing the front side 2 and a second detector element 7 facing the back side of the disc-shaped object 4. Furthermore, a means 8 is provided for...

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Bibliographische Detailangaben
Hauptverfasser:	SCHENCK RENE, IFFLAND THOMAS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	An apparatus for inspecting the front side and the back side 2, 3 of a disc-shaped object 4 is disclosed. A detection unit 5 has a first detector element 6 facing the front side 2 and a second detector element 7 facing the back side of the disc-shaped object 4. Furthermore, a means 8 is provided for generating a relative movement between the detection unit 5 and the disc-shaped object 4 so that an image is made of the front side and the back side 2, 3 of the disc-shaped object 4.