Substrate crack inspection apparatus and substrate crack inspecting method
The present invention aims to provide a substrate crack inspection apparatus comprising: a striking portion for producing a sound by providing a vibration to a substrate; a first microphone for capturing the sound produced by the striking portion; an acoustic analysis portion for carrying out an aco...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention aims to provide a substrate crack inspection apparatus comprising: a striking portion for producing a sound by providing a vibration to a substrate; a first microphone for capturing the sound produced by the striking portion; an acoustic analysis portion for carrying out an acoustic analysis of the sound captured by the first microphone to determine a first power spectrum and judging whether or not a substrate crack exists based on a spectral intensity of a predetermined frequency region; and eliminating means for an eliminating the effect of external noise on the produced sound. |
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