Method of approaching probe and apparatus for realizing the same

A probe is moved to a direction where the tip of the probe and the tip of a shadow of the probe coincide at a target position on a display of the charged particle beam microscope while observing the distance between the tip of the probe and the target position during approaching the tip of the probe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	MUNEKANE MASANAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TESTING
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Beschreibung
Zusammenfassung:	A probe is moved to a direction where the tip of the probe and the tip of a shadow of the probe coincide at a target position on a display of the charged particle beam microscope while observing the distance between the tip of the probe and the target position during approaching the tip of the probe to the target position by use of a charged particle beam microscope with the probe tilted.