Method and apparatus for nondestructive sample inspection

An apparatus for inspecting a sample for defects includes a signal generator for generating a signal and a device for splitting the signal into two separate signals which have substantially equal phase and magnitude. A sensor radiates the two signals on the sample and receives the two signals reflec...

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Bibliographische Detailangaben
Hauptverfasser:	ZOUGHI REZA, GHASR MOHAMMAD T.A, KHARKIVSKIY SERGIY
Format:	Patent
Sprache:	eng
Schlagworte:	INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An apparatus for inspecting a sample for defects includes a signal generator for generating a signal and a device for splitting the signal into two separate signals which have substantially equal phase and magnitude. A sensor radiates the two signals on the sample and receives the two signals reflected from the sample. A device is provided for determining a difference between the two signals reflected from the sample without unwanted influence of variations of distance between the sensor and sample, and reflections from nearby sample edges and boundaries. A defect is determined to exist when a difference is found between the two reflected signals.