Systems and method for lights-out manufacturing
Complex process control and maintenance are performed utilizing a nonlinear regression analysis to determine optimal tool-specific adjustments based on operational metrics, process adjustments and maintenance activities.
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | Complex process control and maintenance are performed utilizing a nonlinear regression analysis to determine optimal tool-specific adjustments based on operational metrics, process adjustments and maintenance activities. |
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