Method of producing a titanium-suboxide-based coating material, correspondingly produced coating material and sputter target provided there-with

A method of producing a titanium-suboxide-based coating material comprises the following steps: providing a titanium-suboxide base material; and treating the titanium-suboxide base material under oxidizing conditions for in-situ development of a finely dispersed titanium-dioxide component in the cer...

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Bibliographische Detailangaben
Hauptverfasser: DIETRICH KLAUS, RIX RICARDA, JANSEN FRANZ, VAN OSTEN KARL-UWE, SCHAFF WOLFGANG
Format: Patent
Sprache:eng
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Zusammenfassung:A method of producing a titanium-suboxide-based coating material comprises the following steps: providing a titanium-suboxide base material; and treating the titanium-suboxide base material under oxidizing conditions for in-situ development of a finely dispersed titanium-dioxide component in the ceramic titanium-suboxide base material.