Arrangement of a micro-optical component on a substrate, a method for adjustment of the arrangement, and an optical system with the arrangement

Arrangement of a micro-optical component on a substrate, a method for adjustment of the arrangement, and an optical system with the arrangement

An arrangement of a microoptical component on a substrate, containing an adjustment connection which is provided between the component and the substrate and containing a first and a second connection element, which, matching one another, have first and second surfaces which are in contact and allow...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUHNELT MICHAEL, STEEGMULLER ULRICH, SCHWARZ THOMAS
Format: Patent
Sprache:eng
Schlagworte:
CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILSOF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
INSTRUMENT DETAILS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PERFORMING OPERATIONS
PHYSICS
TRANSPORTING
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Beschreibung
Zusammenfassung:An arrangement of a microoptical component on a substrate, containing an adjustment connection which is provided between the component and the substrate and containing a first and a second connection element, which, matching one another, have first and second surfaces which are in contact and allow adjustment in different relative positions. This arrangement allows particularly simple adjustment of a microoptical component, for example, in the beam path of an optical component.