Method for operating an X-ray analysis apparatus with two-dimensional array detector and X-ray analysis apparatus for carrying out the method

A method for operating an X-ray analysis device with a source ( 17 ) for X-ray radiation, an object ( 19 ) under investigation which is irradiated with X-ray radiation, and a planar two-dimensional array detector with pixel elements ( 7 ) for spatially resolved detection of the X-ray radiation emitted by the object ( 19 ), whereby a data set, in particular, in the form of a digitized diffractogram and/or spectrum is obtained, characterized by the following steps: a) recording a first data set ( 11 ) in a first relative spatial position (P 1 ) of source ( 17 ), object ( 19 ) and detector; b) displacement and/or rotation of the detector in the detector plane relative to the source ( 17 ) and the object ( 19 ), whereby the relative position of source ( 17 ) and object ( 19 ) is not changed; c) recording a second data set ( 11 ) in the position (P 2 ) displaced according to step b); and d) superposition of the recorded data sets ( 11 ) to form an overall data set ( 13 ), wherein the pixels of the recorded data sets are combined corresponding to their actual relative position with respect to the source ( 17 ) and object ( 19 ). The inventive method or the inventive X-ray analysis device comprising means for carrying out this method reduces the dead pixels in a data set due to faulty pixel elements or pixel elements weighted with 0 in a simple manner. The use of individual detectors composed of several sensor chips eliminates disturbing influences of the edge regions during generation of data sets. Moreover, the recording region is increased and, with suitable selection of displacement of the sensor chips, the spatial resolution of the measurement is also improved.