System for detecting warped carriers and associated methods

Disclosed herein is a warp detection system ( 200 ) for determining warping in a carrier ( 110 ) configured to carry substrates ( 120 ) for processing. In one embodiment, the system ( 200 ) includes a guide plate ( 210 ) configured to guide a path of the carrier ( 110 ) during the processing, where...

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Bibliographische Detailangaben
Hauptverfasser:	PARTOSA RAYMOND M, VILUAN RAMIL A, ALVIAR MELVIN B, CASALLO ROMULO D.JR
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	Disclosed herein is a warp detection system ( 200 ) for determining warping in a carrier ( 110 ) configured to carry substrates ( 120 ) for processing. In one embodiment, the system ( 200 ) includes a guide plate ( 210 ) configured to guide a path of the carrier ( 110 ) during the processing, where the guide plate ( 210 ) is positioned underneath the carrier ( 110 ). In addition, the system ( 220 ) includes a plurality of sensors ( 230 ) positioned within the guide plate ( 210 ), wherein each of the plurality of sensors ( 230 ) is configured to measure a distance of a respective area of the carrier ( 110 ) from the guide plate ( 210 ). Also in this embodiment, the system ( 200 ) includes a processing device ( 310 ) configured to receive the measured distances and determine warping in the carrier ( 110 ) based on differences between the measured distances. Also disclosed are a method of determining warping in a carrier ( 110 ) configured to carry substrates ( 120 ) for processing, and a method of manufacturing a warp detection system ( 200 ) for determining warping in a carrier ( 110 ) configured to carry substrates ( 120 ) for processing.