Work carrier
A work carrier capable of moving a work stage 45 to an arbitrary position in the left/right direction and stopping the work stage 45 thereat with an accuracy equivalent to that of a conventional carrier or above through an inexpensive structure. The work carrier comprises a fixed guide rail member 1...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A work carrier capable of moving a work stage 45 to an arbitrary position in the left/right direction and stopping the work stage 45 thereat with an accuracy equivalent to that of a conventional carrier or above through an inexpensive structure. The work carrier comprises a fixed guide rail member 15 and movable guide rail members 17, 18, 19 mounted on a supporting table 10, a driver 16 for moving the movable guide rail members to the left and the right, rail member interlocking mechanisms 35 a, 35 b for interlockingly operating the movable guide rail members 17, 18, 19, and the work stage 45 mounted on the movable guide rail member 19, wherein the driver 16 is a motor having a rotational speed being varied by inverter control and employing an open loop rotation control system, and a plurality of stopper members 52 a, 52 b, 52 c are provided in order to stop the movable guide rail member 17 at a specified position. |
---|