Work carrier

A work carrier capable of moving a work stage 45 to an arbitrary position in the left/right direction and stopping the work stage 45 thereat with an accuracy equivalent to that of a conventional carrier or above through an inexpensive structure. The work carrier comprises a fixed guide rail member 1...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUGATA SHINSUKE, AMAKO TOSHIHIKO, OOHIRA YASUHITO
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A work carrier capable of moving a work stage 45 to an arbitrary position in the left/right direction and stopping the work stage 45 thereat with an accuracy equivalent to that of a conventional carrier or above through an inexpensive structure. The work carrier comprises a fixed guide rail member 15 and movable guide rail members 17, 18, 19 mounted on a supporting table 10, a driver 16 for moving the movable guide rail members to the left and the right, rail member interlocking mechanisms 35 a, 35 b for interlockingly operating the movable guide rail members 17, 18, 19, and the work stage 45 mounted on the movable guide rail member 19, wherein the driver 16 is a motor having a rotational speed being varied by inverter control and employing an open loop rotation control system, and a plurality of stopper members 52 a, 52 b, 52 c are provided in order to stop the movable guide rail member 17 at a specified position.