High-concentration particle concentrate, powder, preparing method of high-concentration particle concentrate, and preparing method of powder

A powder preparing device has a filtering device which processes CMP waste water and a vacuum dry-freezing device which dries a slurry which is concentrated to a high concentration by the filtering device. A membrane module in which at least one gel filtering film in which a gel layer is formed on a...

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Bibliographische Detailangaben
Hauptverfasser:	SHIBATA ETSURO, UESUGI HIROSHI, ISEKI MASAHIRO, UMEZAWA HIROYUKI, MAEDA MASAYUKI, NAKAMURA TAKASHI, TSUIHIJI MOTOYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF DYES GRINDING HUMAN NECESSITIES HYGIENE INORGANIC CHEMISTRY MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE MEDICAL OR VETERINARY SCIENCE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS NON-METALLIC ELEMENTS PAINTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POLISHES POLISHING PREPARATIONS FOR MEDICAL, DENTAL, OR TOILET PURPOSES THEIR RELEVANT APPARATUS TOOLS FOR GRINDING, BUFFING, OR SHARPENING TRANSPORTING
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Beschreibung
Zusammenfassung:	A powder preparing device has a filtering device which processes CMP waste water and a vacuum dry-freezing device which dries a slurry which is concentrated to a high concentration by the filtering device. A membrane module in which at least one gel filtering film in which a gel layer is formed on a surface of a filtering membrane having a pore size of 0.25 mum is provided is placed within the filtering device. A pump sucks waste water from within the gel filtering membrane of the membrane module. The high-concentration slurry obtained by the filtering device may be supplied for various uses without further processing, or a powder may be obtained by transporting the high-concentration slurry to the vacuum dry-freezing device using a transporting pump and applying a drying process.