ASSEMBLY AND METHOD FOR TRANSFERRING IMPRINT LITHOGRAPHY TEMPLATES

Disclosed is a template transfer assembly and method that features a template transfer substrate, and a template having first and second sides, with the first side facing away from the template transfer substrate and the second side facing the template transfer substrate and having mold pattern form...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CHOI BYUNG J, MEISSL MARIO J
Format:	Patent
Sprache:	eng
Schlagworte:	ADDRESSING MACHINES OR LIKE SERIES-PRINTING MACHINES AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING APPARATUS OR DEVICES FOR MANIFOLDING, DUPLICATING, OR PRINTINGFOR OFFICE OR OTHER COMMERCIAL PURPOSES APPARATUS SPECIALLY ADAPTED THEREFOR AUXILIARY PROCESSES IN PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY LINING MACHINES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES NANOTECHNOLOGY ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR,STEREO-PHOTOGRAPHIC PROCESSES PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES PHYSICS PRINTING SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES STAMPS TRANSPORTING TYPEWRITERS WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	Disclosed is a template transfer assembly and method that features a template transfer substrate, and a template having first and second sides, with the first side facing away from the template transfer substrate and the second side facing the template transfer substrate and having mold pattern formed thereon. Polymerized imprint material is disposed between the second side and the template transfer substrate to fixedly attach the template to the template transfer substrate. The method of transferring an imprint lithography template includes dispensing a selected volume of imprinting fluid onto the template transfer substrate, placing the template upon the selected volume; and converting the imprinting fluid to solid imprint material. The selected volume of imprint material is of sufficient quantity to fixedly attach the template to the template transfer substrate while maintaining a space between the mold and the template transfer substrate.