Methods and apparatus for cleaning and drying a work piece

Methods and apparatus are provided for the cleaning and drying of a work piece. The apparatus comprises a carrier configured to carry a work piece that has a surface. The apparatus further comprises a press plate having a first surface and a second surface. During a cleaning process, the carrier, th...

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Bibliographische Detailangaben

Hauptverfasser:	DINNEEN MARK, STOWELL R. M, JANICKI MICHAEL J, CLEARY TIM
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL SEMICONDUCTOR DEVICES TRANSPORTING
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