Coating device and coating method

A coating apparatus ( 10 ) includes: a substrate holding section ( 16 ) which holds a substrate having a step on a major surface; a coating section ( 31 ) which applies a plurality of liquids different in viscosity from each other on a substrate; and a control section ( 70 ) which controls the coati...

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Bibliographische Detailangaben
Hauptverfasser:	CHUNG GISHI, TANAKA MICHIO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPARATUS SPECIALLY ADAPTED THEREFOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SEMICONDUCTOR DEVICES SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A coating apparatus ( 10 ) includes: a substrate holding section ( 16 ) which holds a substrate having a step on a major surface; a coating section ( 31 ) which applies a plurality of liquids different in viscosity from each other on a substrate; and a control section ( 70 ) which controls the coating section according to an arrangement of a step on the substrate. It is possible to effectively eliminate the steps of the substrate by applying the plural liquids different in viscosity according to the arrangement of the steps.