Pre-fabrication scribing

Singulating a wafer into individual die using a pre-scribing technique. Embodiments of the invention relate to scribing a wafer prior to the fabrication process in order to help preserve the integrity of the fabricated devices during singulation.

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1. Verfasser: MULLIGAN ROSE
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Singulating a wafer into individual die using a pre-scribing technique. Embodiments of the invention relate to scribing a wafer prior to the fabrication process in order to help preserve the integrity of the fabricated devices during singulation.