Sealing method for electronic devices formed on a common semiconductor substrate and corresponding circuit structure

A method for sealing electronic devices formed on a semiconductor substrate includes forming at least one first conductive layer on a first portion of the semiconductor substrate for defining electronic devices, and forming a second conductive layer on a second portion of semiconductor substrate for...

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Bibliographische Detailangaben
Hauptverfasser: ZABBERONI PAOLA, CAMERLENGHI EMILIO, MAURELLI ALFONSO, PESCHIAROLI DANIELA
Format: Patent
Sprache:eng
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Zusammenfassung:A method for sealing electronic devices formed on a semiconductor substrate includes forming at least one first conductive layer on a first portion of the semiconductor substrate for defining electronic devices, and forming a second conductive layer on a second portion of semiconductor substrate for also defining electronic devices. First regions are formed in the at least one first conductive layer for defining electronic devices, and a first sealing layer is formed on the whole semiconductor substrate to seal the first regions. Second regions are formed in the second conductive layer for defining electronic devices, and a second sealing layer is formed on the whole semiconductor substrate to seal the second regions.