Method for the production of a facetted mirror

In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12 ', which have mirror surfaces 15 and are fitted into reception bores 22, 22 ' of a support plate 16, the mirror facets 12, 12 ' are made in a first method step. At least one of the mir...

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Bibliographische Detailangaben
Hauptverfasser: HEISLER ANDREAS, SEIFERT ANDREAS, DORNHEIM STEFAN, WEISS MARKUS
Format: Patent
Sprache:eng
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Zusammenfassung:In a method for the production of a facetted mirror 24 having a plurality of mirror facets 12 and 12 ', which have mirror surfaces 15 and are fitted into reception bores 22, 22 ' of a support plate 16, the mirror facets 12, 12 ' are made in a first method step. At least one of the mirror facets is fitted into the associated reception bore of the support plate in a second method step, after which the ACTUAL position of the optical axis of at least one mirror surface of an associated mirror facet 12, 12 ' fitted into the support plate is respectively determined in a third step and compared with a SET position of a predetermined optical axis. Knowing the measured values determined for the at least one mirror facet 12, 12 ' in the third method step, reprocessing of the mirror facet and/or of the reception bore is subsequently carried out in a further method step if there is an angular deviation between the ACTUAL position and the SET position.