Camera head for fast reproduction of a vaccum uv spectrometer spectrum

Camera head for fast reproduction of a vaccum uv spectrometer spectrum

The invention relates to an apparatus comprising a spectrometer, means for the spatially-resolving conversion into charge of light exiting the spectrometer, an integrator circuit for the spatially-resolving integration of the charge, as well as means for displaying the charge that is integrated depe...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TELEMANN GERD, BIEL WOLFGANG, SCHOLL ALFRED, SANDRI NORBERT, BRINKMANN DIETMAR
Format: Patent
Sprache:eng
Schlagworte:
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Beschreibung
Zusammenfassung:The invention relates to an apparatus comprising a spectrometer, means for the spatially-resolving conversion into charge of light exiting the spectrometer, an integrator circuit for the spatially-resolving integration of the charge, as well as means for displaying the charge that is integrated dependent on the position. The integrator circuit is assembled from discrete components. Thus, the transport of plasma impurities can be properly measured.