Test gas leakage detector

The invention relates to a test gas leakage detector (1), comprising an inlet (2) for gases to be analyzed for the presence of a test gas, a test gas detector (22), a high vacuum pump system (15) connected to the test gas detector, an intermediate inlet (14) arranged on the high vacuum pump system (...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	GROSSE-BLEY WERNER, BOHM THOMAS, HIRCHE RALF
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The invention relates to a test gas leakage detector (1), comprising an inlet (2) for gases to be analyzed for the presence of a test gas, a test gas detector (22), a high vacuum pump system (15) connected to the test gas detector, an intermediate inlet (14) arranged on the high vacuum pump system (15) and used to supply the gases to be analyzed for the presence of a test gas, a fore-vacuum pump (8) connected to high vacuum pump system (15) and a line section (3, 6) fitted with a valve (5) and located between the inlet (2) and the fore-vacuum pump (8). In order to provide a device of the above-mentioned category which is quicker and more sensitive, another high vacuum pump (11) is provided between the inlet (2) and the intermediate inlet (14), having an outlet (12) which is connected to the inlet (7) of the fore-vacuum pump (8) by means of a line section fitted with a valve (17).