Fabrication of parallel plate capacitors using BST thin films

A parallel-plate capacitor includes a bottom electrode, a BST thin film dielectric region and a top electrode. The capacitor is processed using various orders of processing steps in order to improve the end result.

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Bibliographische Detailangaben
Hauptverfasser:	YORK ROBERT A, ACIKEL BAKI, TAYLOR TROY R
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A parallel-plate capacitor includes a bottom electrode, a BST thin film dielectric region and a top electrode. The capacitor is processed using various orders of processing steps in order to improve the end result.