Tool and fixture for measuring mechanical and electromechanical properties for IC assemblies and features

Tool and fixture for measuring mechanical and electromechanical properties for IC assemblies and features

Disclosed are the methods and tools to reliably and accurately predict and model the strength of the individual features and structures of semiconductor components. By modifying the traditional anvil/pyramidal indentors on a hardness tester, an improved method has been created to evaluate the mechan...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: COLLIER TERENCE QUINTIN
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CURRENT COLLECTORS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
LINE CONNECTORS
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Disclosed are the methods and tools to reliably and accurately predict and model the strength of the individual features and structures of semiconductor components. By modifying the traditional anvil/pyramidal indentors on a hardness tester, an improved method has been created to evaluate the mechanical forces on micron and submicron devices. This tool will provide a method to predict and analyze various mechanical, electrical and electromechanical states to help improve process yield, overall reliability, and design features. The modified tool will provide both a real-time process tool as well a development tool.