Vacuum-use motor
It is an object to provide a vacuum motor in which outgassing rate from a resin is low, the outgassing to contaminate a vacuum environment is lessened, and furthermore, the loss of an eddy current is decreased even if the vacuum motor is exposed to the vacuum environment. In a motor for a vacuum use...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | It is an object to provide a vacuum motor in which outgassing rate from a resin is low, the outgassing to contaminate a vacuum environment is lessened, and furthermore, the loss of an eddy current is decreased even if the vacuum motor is exposed to the vacuum environment. In a motor for a vacuum use in which at least a part is constituted by a can (102) formed of a resin or a motor for a vacuum use which has a coil molded with a resin, at least a part of a surface of the resin is covered with an inorganic film (107) and a metal, ceramics or electroless nickel plating is suitable for the inorganic film. Thus, the motor for a vacuum use can be applied to a vacuum linear motor. |
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