Active matrix substrate

Active matrix substrate

A method of manufacturing an active matrix substrate (1) comprising a row and column array of active elements (10) wherein each element (11) is associated with a TFT (13) having a gate electrode (306) connected to a corresponding row conductor (15) and source (320) and drain (321) electrodes connect...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: TRAINOR MICHAEL J, AYRES JOHN R.A
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FREQUENCY-CHANGING
NON-LINEAR OPTICS
OPTICAL ANALOGUE/DIGITAL CONVERTERS
OPTICAL LOGIC ELEMENTS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A method of manufacturing an active matrix substrate (1) comprising a row and column array of active elements (10) wherein each element (11) is associated with a TFT (13) having a gate electrode (306) connected to a corresponding row conductor (15) and source (320) and drain (321) electrodes connected to corresponding column conductors (14), and ESD protective circuitry (20) connected to at least one of the row conductors for protecting the TFTs against electrostatic discharge (ESD). The method comprising the steps of forming semiconductor regions of the TFTs (302) and the ESD protective circuitry (303); depositing gate electrodes (306) of the TFTs and corresponding row conductors (15); and depositing source (320) and drain (321) electrodes of the TFTs and corresponding column conductors (14), wherein the ESD protective circuitry (20) is operative to control ESD prior to deposition of the column conductors (14).