Dual para-xylylene layers for an X-ray detector

The present invention provides an X-ray detector assembly and a fabrication method, where the X-ray detector assembly includes a scintillator material disposed on a detector matrix array disposed on a detector substrate; and an encapsulating coating disposed on the scintillator material. The encapsu...

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Bibliographische Detailangaben
Hauptverfasser:	SHAW JEFFREY JON, WEI CHING-YEU, FOBARE DAVID FRANCIS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	The present invention provides an X-ray detector assembly and a fabrication method, where the X-ray detector assembly includes a scintillator material disposed on a detector matrix array disposed on a detector substrate; and an encapsulating coating disposed on the scintillator material. The encapsulating coating includes a combination of a mono-chloro-poly-para-xylylene layer and a poly-para-xylylene layer. In one embodiment, a poly-para-xylylene layer is disposed over the scintillator material and a mono-chloro-poly-para-xylylene layer is disposed over the poly-para-xylylene layer.