Method and device for producing globular grains of high-puroty silicon having a diameter of between 50 um and 300um and use of the same
The invention relates to a method and a device for producing globular grains of high-purity silicon by atomising a silicon melt (6) in an ultrasonic field (10). Globular grains having a grain size of 50 mum can be produced by means of said method and device and can be used to separate high-purity si...
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Zusammenfassung: | The invention relates to a method and a device for producing globular grains of high-purity silicon by atomising a silicon melt (6) in an ultrasonic field (10). Globular grains having a grain size of 50 mum can be produced by means of said method and device and can be used to separate high-purity silicon from silane in the fluid bed. The silicon melt (6) is fed into the ultrasonic field (10) at a distance of |
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