Optical sensor

An optical sensor for use in high vacuum plants and/or in ultrahigh vacuum plants has a metal housing surrounding an interior space in a manner substantially impermeable to gas in which a window which transmits light to be detected is provided and an optical sensor element arranged in the interior s...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: BLUEMCKE THOMAS, HOERSCH INGOLF
Format: Patent
Sprache:eng
Schlagworte:
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