Optical sensor

An optical sensor for use in high vacuum plants and/or in ultrahigh vacuum plants has a metal housing surrounding an interior space in a manner substantially impermeable to gas in which a window which transmits light to be detected is provided and an optical sensor element arranged in the interior s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BLUEMCKE THOMAS, HOERSCH INGOLF
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An optical sensor for use in high vacuum plants and/or in ultrahigh vacuum plants has a metal housing surrounding an interior space in a manner substantially impermeable to gas in which a window which transmits light to be detected is provided and an optical sensor element arranged in the interior space for the detection of light to be detected which is incident through the window.