Microfabricated ultrasonic transducers with curvature and method for making the same
The present invention provides a microfabricated ultrasonic transducers with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, the substrate can contain electron...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention provides a microfabricated ultrasonic transducers with curvature. The curvature is made possible by thinning the substrate such that it is flexible enough to be mounted on an assembly with the desired curvature. In one aspect of the invention, the substrate can contain electronic circuits. In another aspect, the assembly mounting can incorporate curved damping materials that serve to remove undesirable substrate modes. |
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