Vacuum pump
A heater 29 is mounted on the outer peripheral surface of a base 6 to heat the base 6. A heat shutoff wall 24b is provided on a motor housing 24 to prevent the radiation heat of the base 6 heated by the heater 29 from transferring to a pump inside substrate 25. A gap portion 27 is formed by providin...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A heater 29 is mounted on the outer peripheral surface of a base 6 to heat the base 6. A heat shutoff wall 24b is provided on a motor housing 24 to prevent the radiation heat of the base 6 heated by the heater 29 from transferring to a pump inside substrate 25. A gap portion 27 is formed by providing a gap between the motor housing 24 and the base 6 to prevent the heat of the base 6 heated by the heater 29 from transferring to the motor housing 24. Also, a water cooled tube 28 is installed under the motor housing fixing portion 24c and cooling water is circulated in the tube to efficiently cool the pump inside substrate 25. By constructing a vacuum pump in this manner, the accumulation of solid product of process gas in the vacuum pump is restrained, and thus the pump inside substrate can be cooled efficiently. |
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