Optical members and methods for predicting the performance of optical members and optical systems

Optical members, methods of manufacturing optical members and predicting the performance of optical members in optical systems using excimer lasers are disclosed. The methods can be used in designing optical systems using excimer lasers. The methods include measuring the wavefront change of samples...

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Bibliographische Detailangaben
Hauptverfasser:	BORRELLI NICHOLAS F, HESLIN MICHAEL R, MOLL JOHANNES, SMITH CHARLENE M, LINDER MICHAEL W
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY GLASS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES MEASURING METALLURGY MINERAL OR SLAG WOOL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	Optical members, methods of manufacturing optical members and predicting the performance of optical members in optical systems using excimer lasers are disclosed. The methods can be used in designing optical systems using excimer lasers. The methods include measuring the wavefront change of samples of glass at the operating wavelength of the optical system.