Positioning stage actuation

A positioning device and method for moving a positioning stage is provided. The device includes a movable stage, at least one actuator, and the same number of sensors as there are actuators. Each actuator is placed such that it applies a force along a line parallel to the line of movement of the pos...

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Bibliographische Detailangaben
Hauptverfasser:	AMATUCCI EDWARD G, HOWARD LOWELL P, KRAMER JOHN A, DAGALAKIS NICHOLAS G, SCIRE FREDERIC E, MARCINKOSKI JASON
Format:	Patent
Sprache:	eng
Schlagworte:	COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS METAL-WORKING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS TRANSPORTING
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Beschreibung
Zusammenfassung:	A positioning device and method for moving a positioning stage is provided. The device includes a movable stage, at least one actuator, and the same number of sensors as there are actuators. Each actuator is placed such that it applies a force along a line parallel to the line of movement of the positioning stage. Each actuator can be operated to generate an input force for moving the movable stage. A sensor is placed along the force line of each included actuator. Each sensor detects movement of the positioning stage. A first force is applied to a first location on the positioning stage. A second force is applied to a second location on the positioning stage. Application of the first and the second forces moves the positioning stage. The first location and the second location are symmetrically located about an axis of the positioning stage.