Method and photo mask for manufacturing an array substrate

A method of manufacturing an array substrate comprising; depositing an amorphous material on a transparent substrate; and changing said amorphous material to a polycrystalline material by irradiation of energy beams through a photo mask, said mask including a transparent region permitting said energ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHIMOTO SHIGEYUKI, UCHIKOGA SHUICHI
Format: Patent
Sprache:eng
Schlagworte:
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