Apparatus and method for testing semiconductor devices

There is disclosed an apparatus for supporting singulated electronic devices during a testing operation, comprising: a main body and a support member, wherein said support member is made of non-conducting high-resistivity material and comprises a plurality of recesses, each said recess being adapted...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TSUI CHING MAN STANLEY, CHOW ERIC, BILAN CURITO M
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:There is disclosed an apparatus for supporting singulated electronic devices during a testing operation, comprising: a main body and a support member, wherein said support member is made of non-conducting high-resistivity material and comprises a plurality of recesses, each said recess being adapted to receive an individual singulated device. There is also disclosed a method for testing such devices in which the devices are carried on support members through a testing process including one or more environmental control chambers.