Small size, high capacitance readout silicon based MEMS accelerometer

An apparatus and method for sensing accelerations and other forces. The apparatus having a cover plate having an inner portion and an outer portion, the inner portion being formed with a plurality of spaced apart electrodes projecting therefrom and defining spaces therebetween; and a proof mass havi...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	LEONARDSON RONALD B
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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