Small size, high capacitance readout silicon based MEMS accelerometer

An apparatus and method for sensing accelerations and other forces. The apparatus having a cover plate having an inner portion and an outer portion, the inner portion being formed with a plurality of spaced apart electrodes projecting therefrom and defining spaces therebetween; and a proof mass having an inner portion being formed with a plurality of spaced apart electrodes projecting therefrom and defining spaces therebetween, an outer portion being coupled to the outer portion of the cover plate with the electrodes being electrically isolated from the cover plate electrodes, and the proof mass electrodes and spaces being aligned with the cover plate electrodes and spaces such that, when the inner portion of the proof mass is deflected toward the cover plate, the proof mass electrodes pass into the spaces between the cover plate electrodes, and a flexible suspension member coupled between the inner and outer proof mass portions.