Computer memory product for substrate surface treatment applications

A computer-readable memory product containing a program suitable for controlling a substrate surface finishing apparatus. In one embodiment, the computer-readable memory product contains program code suitable for re-configuring, with appropriate apparatus component changes, a double-brush scrubber i...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	MALIK IGOR J
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC DIGITAL DATA PROCESSING FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS PHYSICS POLISHING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A computer-readable memory product containing a program suitable for controlling a substrate surface finishing apparatus. In one embodiment, the computer-readable memory product contains program code suitable for re-configuring, with appropriate apparatus component changes, a double-brush scrubber into a touch polish surface finishing system. In another embodiment, the computer-readable memory product contains program code suitable for controlling a substrate surface finishing system to selectively process a portion or portions of the substrate, such as removing a ridge of material from a perimeter portion of the substrate, or smoothing a step between a thin film layer bonded to a handle wafer.