METHOD FOR FORMING A SEMICONDUCTOR DEVICE HAVING A METALLIC SUBSTRATE

The present invention provides a method for forming a semiconductor device with a metallic substrate. The method comprises providing a semiconductor substrate. At least a semiconductor layer is formed on the semiconductor substrate. A metallic electrode layer is formed on the semiconductor layer. Th...

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Bibliographische Detailangaben
Hauptverfasser: YIH NAE-GUANN, CHEN CHIEN-AN, WU BOR-JEN, CHEN NAIUAN, TZOU YUAN-HSIN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention provides a method for forming a semiconductor device with a metallic substrate. The method comprises providing a semiconductor substrate. At least a semiconductor layer is formed on the semiconductor substrate. A metallic electrode layer is formed on the semiconductor layer. The metallic substrate is formed on the metallic electrode layer and the semiconductor substrate is removed. The metallic substrate has advantages of high thermal and electrical conductivity, that can improve the reliability and life-time of the semiconductor device.